Influence of squeeze-film damping on higher-mode microcantilever vibrations in liquid
نویسندگان
چکیده
منابع مشابه
Squeeze Film Air Damping in Tapping Mode Atomic Force Microscopy
In dynamic plowing lithography, the sample surface is indented using a vibrating tip in tapping mode atomic force microscopy. During writing, the gap between the cantilever and the sample surface is very small, usually on the order of micrometers. High vibration frequency and small distance induce squeeze film air damping from the air in the gap. This damping can cause variations in the cantile...
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In Atomic force microscope (AFM) examination of a vibrating microcantilever, the nonlinear tip-sample interaction would greatly influence the dynamics of the cantilever. In this paper, the nonlinear dynamics and chaos of a tip-sample dynamic system being run in the tapping mode (TM) were investigated by considering the effects of hydrodynamic loading and squeeze film damping. The microcantileve...
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An improved theoretical approach is proposed to predict the dynamic behavior of long, slender and flexible microcantilevers affected by squeeze-film damping at low ambient pressures. Our approach extends recent continuum gas damping models (Veijola 2004 J. Micromech. Microeng. 14 1109–18, Gallis and Torczynski 2004 J. Microelectromech. Syst. 13 653–9), which were originally derived for a rigid ...
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ژورنال
عنوان ژورنال: EPJ Techniques and Instrumentation
سال: 2014
ISSN: 2195-7045
DOI: 10.1140/epjti/s40485-014-0010-6